For citations:
Kuzmenko A.P., Kashkin I.S., Kolpakov A.I., Saprykin I.S. Dimensional features and mechanisms of growth of magnetron nanofilms of Tantalum nitride during high-frequency reactive formation. Proceedings of the Southwest State University. Series: Engineering and Technology. 2025;15(4):65-81. (In Russ.) https://doi.org/10.21869/2223-1528-2025-15-4-65-81
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