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Proceedings of the Southwest State University. Series: Engineering and Technology

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Kuzmenko A.P., Kashkin I.S., Kolpakov A.I., Zhakin A.I., Yemelyanov V.M. Structural and morphological features of magnetron nanofilms of TaN with different thicknesses. Proceedings of the Southwest State University. Series: Engineering and Technology. 2024;14(3):147-164. (In Russ.) https://doi.org/10.21869/2223-1528-2024-14-3-147-164



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ISSN 2223-1528 (Print)

94, ul. 50 let Oktyabrya, Kursk, Russia, 305040  
Southwest State University
tel.: 8 (4712) 22-25-26
e-mail: rio_kursk@mail.ru

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