Atomic Force Microscopy of in-situ Structuring During Deformation of Nanofilm Materials

Purpose of the study. To develop and manufacture a device based on a piezoactuator for mechanical deformation of samples during examination with an atomic force microscope. Study of the evolution of nanostructured surfaces using atomic force microscopy under mechanical stress.

Methods. Measurements of the movement of the piezoactuator by the capacitive method; examination of the surface on a confocal microscope; the formation of the studied films by magnetron sputtering; study of the topography of the surface of samples on an atomic force microscope.

Results. A test model of a device built into an atomic force microscope was made to study the deformation (compression) of samples using a piezoactuator. The capabilities of the device were tested using a confocal microscope. The spatial resolution of the device was achieved, which amounted to D±∆D = 1.071±0.160 µm (accuracy  15%), which made it possible to detect deformation of the surface of the fixed sample. Taking into account the highest temperature of transition to the superconducting state among metals, the choice of niobium as a material for studying structural changes during compression of a magnetron nanofilm on a substrate in the form of a metal plate with high elastic properties, which is characteristic of the HDD sensor head holder, is justified. Studies in the in situ compression mode of a niobium magnetron nanofilm using an atomic force microscope established and described nanoscale changes in the surface structure of a niobium nanofilm under the influence of a piezoactuator.

Conclusion. The tests carried out under the conditions of linear and controlled deformation, combined with nano- and microstructural studies in the in situ mode by atomic force microscopy, showed structural changes of the surface of the magnetron nanofilm from niobium, which indicates the activation of the mechanism of surface aggregation of nanoclusters forming the film.

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