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Proceedings of the Southwest State University. Series: Engineering and Technology

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Kuzmenko A.P., Kolpakov A.I., Sizov A.S., Emelyanov V.M., Neruchev Yu.A. Magnetron carbon structures obtained by high-frequency magnetron sputtering in Argon and Nitrogen. Proceedings of the Southwest State University. Series: Engineering and Technology. 2024;14(2):71-87. (In Russ.) https://doi.org/10.21869/2223-1528-2024-14-2-71-87



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ISSN 2223-1528 (Print)

94, ul. 50 let Oktyabrya, Kursk, Russia, 305040  
Southwest State University
tel.: 8 (4712) 22-25-26
e-mail: rio_kursk@mail.ru

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