<?xml version="1.0" encoding="UTF-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">techusgu</journal-id><journal-title-group><journal-title xml:lang="ru">Известия Юго-Западного государственного университета. Серия: Техника и технологии</journal-title><trans-title-group xml:lang="en"><trans-title>Proceedings of the Southwest State University. Series: Engineering and Technology</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">2223-1528</issn><publisher><publisher-name>Юго-Западный государственный университет</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.21869/2223-1528-2026-16-1-68-85</article-id><article-id custom-type="elpub" pub-id-type="custom">techusgu-389</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>ФИЗИКА</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>PHYSICS</subject></subj-group></article-categories><title-group><article-title>Связь морфологии поверхности и магнитной анизотропии магнетронных пленок Ni на подложке GaAs</article-title><trans-title-group xml:lang="en"><trans-title>Relationship between surface morphology and magnetic anisotropy of Ni magnetron films on GaAs substrate</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0009-0000-4051-811X</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Родионова</surname><given-names>А. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Rodionova</surname><given-names>A. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Родионова Анастасия Алексеевна - аспирант.</p><p>Ул. Коммунаров, д. 28, Елец 399770</p></bio><bio xml:lang="en"><p>Anastasiia A. Rodionova - Postgraduate Student.</p><p>28 Kommunarov Str., Yelets 399770</p></bio><email xlink:type="simple">nastya97zhidkova@yandex.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0003-4323-351X</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Филиппов</surname><given-names>В. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Filippov</surname><given-names>V. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Филиппов Владимир Владимирович, доктор физико-математических наук, профессор, заведующий кафедрой физики и биомедицинской техники, Липецкий государственный технический университет; профессор кафедры математики и физики, Липецкий государственный педагогический университет имени П. П. Семенова-Тянь-Шанского.</p><p>Ул. Московская, д. 30, Липецк 398055; ул. Ленина, д. 42, Липецк 398020</p></bio><bio xml:lang="en"><p>Vladimir V. Filippov - Doctor of Sciences (Physics and Mathematics), Professor, Head of the Department of Physics and Biomedical Engineering, Lipetsk State Technical University; Professor of the Department of Mathematics and Physics, Lipetsk State Pedagogical University, named after P.P. Semenov-Tyan-Shansky.</p><p>30 Moskovskaya Str., Lipetsk 398055; 42 Lenina Str., Lipetsk 398020</p></bio><email xlink:type="simple">wwfilippow@mail.ru</email><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-7089-0692</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Кузьменко</surname><given-names>А. П.</given-names></name><name name-style="western" xml:lang="en"><surname>Kuzmenko</surname><given-names>A. P.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Кузьменко Александр Павлович - доктор физико-математических наук, профессор, главный научный сотрудник Регионального центра нанотехнологий.</p><p>Ул. 50 лет Октября, д. 94, Курск 305040</p></bio><bio xml:lang="en"><p>Aleksander P. Kuzmenko - Doctor of Sciences (Physics and Mathematics), Professor, Chief Researcher of the Regional Center for Nanotechnology.</p><p>50 Let Octyabrya Str. 94, Kursk, 305040</p></bio><email xlink:type="simple">apk3527@mail.ru</email><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0009-0004-8571-8544</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Колпаков</surname><given-names>А. И.</given-names></name><name name-style="western" xml:lang="en"><surname>Kolpakov</surname><given-names>A. I.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Колпаков Артем Игоревич - аспирант.</p><p>Ул. 50 лет Октября, д. 94, Курск 305040</p></bio><bio xml:lang="en"><p>Artem Ig. Kolpakov - Postgraduate Student.</p><p>50 Let Octyabrya Str. 94, Kursk, 305040</p></bio><email xlink:type="simple">artem.kolpakov.96@mail.ru</email><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-1893-1941</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Родионов</surname><given-names>В. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Rodionov</surname><given-names>V. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Родионов Владимир Викторович - кандидат физико-математических наук, старший научный сотрудник Регионального центра нанотехнологий.</p><p>Ул. 50 лет Октября, д. 94, Курск 305040</p><p> </p></bio><bio xml:lang="en"><p>Vladimir V. Rodionov - Candidate of Science (Physics and Mathematics), Senior Researcher of the Regional Center of Nanotechnology.</p><p>50 Let Octyabrya Str. 94, Kursk, 305040</p></bio><email xlink:type="simple">vovarodionov2009@yandex.ru</email><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Сапрыкин</surname><given-names>И. С.</given-names></name><name name-style="western" xml:lang="en"><surname>Saprykin</surname><given-names>I. S.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Сапрыкин Иван Сергеевич - студент кафедры нанотехнологий, микроэлектроники, общей и прикладной физики.</p><p>Ул. 50 лет Октября, д. 94, Курск 305040</p></bio><bio xml:lang="en"><p>Ivan S. Saprykin - Student of the Department of Nanotechnology, Microelectronics, General and Applied Physics.</p><p>50 Let Octyabrya Str. 94, Kursk, 305040</p></bio><email xlink:type="simple">ivan.saprykin.04@mail.ru</email><xref ref-type="aff" rid="aff-4"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Паньков</surname><given-names>А. Д.</given-names></name><name name-style="western" xml:lang="en"><surname>Pankov</surname><given-names>A. D.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Паньков Александр Дмитриевич - студент кафедры нанотехнологий, микроэлектроники, общей и прикладной физики.</p><p>Ул. 50 лет Октября, д. 94, Курск 305040</p></bio><bio xml:lang="en"><p>Aleksandr D. Pankov - Student of the Department of Nanotechnology, Microelectronics, General and Applied Physics.</p><p>50 Let Octyabrya Str. 94, Kursk, 305040</p></bio><email xlink:type="simple">alekxpank26041986@gmail.com</email><xref ref-type="aff" rid="aff-4"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru">Елецкий государственный университет имени И.А. Бунина<country>Россия</country></aff><aff xml:lang="en">Yelets State University named after I.A. Bunin<country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru">Липецкий государственный технический университет; Липецкий государственный педагогический университет имени П. П. Семенова-Тян-Шанского<country>Россия</country></aff><aff xml:lang="en">Lipetsk State Technical University; Lipetsk State Pedagogical University named after P.P. Semenov-Tyan-Shansky<country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-3"><aff xml:lang="ru">Юго-Западный государственный университет<country>Россия</country></aff><aff xml:lang="en">Southwest State University<country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-4"><aff xml:lang="ru">Юго-Западного государственного университета<country>Россия</country></aff><aff xml:lang="en">Southwest State University<country>Russian Federation</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2026</year></pub-date><pub-date pub-type="epub"><day>14</day><month>04</month><year>2026</year></pub-date><volume>16</volume><issue>1</issue><fpage>68</fpage><lpage>85</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Родионова А.А., Филиппов В.В., Кузьменко А.П., Колпаков А.И., Родионов В.В., Сапрыкин И.С., Паньков А.Д., 2026</copyright-statement><copyright-year>2026</copyright-year><copyright-holder xml:lang="ru">Родионова А.А., Филиппов В.В., Кузьменко А.П., Колпаков А.И., Родионов В.В., Сапрыкин И.С., Паньков А.Д.</copyright-holder><copyright-holder xml:lang="en">Rodionova A.A., Filippov V.V., Kuzmenko A.P., Kolpakov A.I., Rodionov V.V., Saprykin I.S., Pankov A.D.</copyright-holder><license license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://techusgu.elpub.ru/jour/article/view/389">https://techusgu.elpub.ru/jour/article/view/389</self-uri><abstract><sec><title>Цель</title><p>Цель. Установить взаимосвязь между морфологическими параметрами никелевых нанопленок на подложках GaAs и их магнитными характеристиками, а также определить влияние механизма нанопленок роста на формирование доменных структур.</p></sec><sec><title>Методы</title><p>Методы. Изучаемые никелевые нанопленки синтезированы методом магнетронного распыления на подложки GaAs в аргоновой среде. Для изучения эволюции свойств нанопленок Ni была создана серия образцов с различными толщинами от 5 нм до 100 нм. Исследование морфологии поверхности проводилось с помощью магнитно-силовой микроскопии в полуконтактном режиме. На основе полученных трехмерных изображений выполнялся количественный анализ, включавший расчет средней арифметической (Ra) и среднеквадратичной (Rq) шероховатости, статистическую обработку распределений размеров структур, определение фрактальной размерности. Кристаллическая структура пленок изучалась методом рентгеновской дифрактометрии в геометрии Брэгга – Брентано. Анализ дифрактограмм для установления фазового состава, определение размера областей когерентности в приближении Шеррера, оценка степени текстурированности материала. Проведены магнитометрические измерения и определены коэрцитивная сила (Hc) и эффективная магнитная анизотропия (Keff).</p></sec><sec><title>Результаты</title><p>Результаты. Установлено, что преимущественный рост пленки реализуется по механизму Вольмера – Вебера. При толщинах 40–50 нм поверхность никелевой магнетронной нанопленки сохраняет шероховатость, формируется лабиринтная доменная структура в форме отдельных островков. Для пленки с толщиной 75 нм возрастает однородность структуры и снижается разброс размеров доменов. При толщине 100 нм фиксируется укрупнение доменных областей и уменьшение шероховатости. Расчеты Keff и Hc показали их взаимосвязь и рост магнитной жесткости при увеличении толщины.</p></sec><sec><title>Заключение</title><p>Заключение. Размер доменов линейно зависит от толщины нанопленок. С ростом толщины никелевой магнетронной нанопленки повышается магнитная жесткость доменной структуры.</p></sec></abstract><trans-abstract xml:lang="en"><sec><title>Purpose</title><p>Purpose. To establish the relationship between the morphological parameters of Nickel nanofilms on GaAs substrates and their magnetic characteristics, and to determine the influence of the nanofilm growth mechanism on the formation of domain structures.</p></sec><sec><title>Methods</title><p>Methods. The Nickel nanofilms under study were synthesized by magnetron sputtering on GaAs substrates in an argon atmosphere. To study the evolution of the Ni nanofilm properties, a series of samples with thicknesses ranging from 5 nm to 100 nm were created. Surface morphology was studied using magnetic force microscopy in tapping mode. Based on the obtained three-dimensional images, a quantitative analysis was performed, including calculation of the arithmetic mean (Ra) and root-mean-square (Rq) roughness, statistical processing of structure size distributions, and determination of fractal dimensions. The crystalline structure of the films was studied using X-ray diffraction in BraggBrentano geometry. Analysis of diffraction patterns was used to establish the phase composition, determine the size of coherence regions using the Scherrer approximation, and assess the degree of texture of the material. Magnetometric measurements were performed, and the coercivity (Hc) and effective magnetic anisotropy (Keff) were determined.</p></sec><sec><title>Results</title><p>Results. It was established that the film grows predominantly via the Volmer-Weber mechanism. At thicknesses of 40– 50 nm, the surface of the Nickel magnetron nanofilm retains its roughness, forming a labyrinthine domain structure in the form of individual islands. For a film thickness of 75 nm, the structural homogeneity increases and the spread of domain sizes decreases. At a thickness of 100 nm, an increase in domain size and a decrease in roughness are observed. Calculations of Keff and Hc showed their interrelationship and an increase in magnetic hardness with increasing thickness.</p></sec><sec><title>Conclusions</title><p>Conclusions. Domain size is linearly dependent on the nanofilm thickness. As the thickness of the Nickel magnetron nanofilm increases, the magnetic hardness of the domain structure increases.</p></sec></trans-abstract><kwd-group xml:lang="ru"><kwd>никель</kwd><kwd>магнетронные нанопленки</kwd><kwd>доменные структуры</kwd><kwd>магнитная анизотропия</kwd></kwd-group><kwd-group xml:lang="en"><kwd>nickel</kwd><kwd>magnetron nanofilms</kwd><kwd>domain structures</kwd><kwd>magnetic anisotropy</kwd><kwd>coercivity</kwd></kwd-group><funding-group xml:lang="ru"><funding-statement>Исследование выполнено при финансовой поддержке Министерства образования и науки РФ г/з 1.2.25Ф</funding-statement></funding-group><funding-group xml:lang="en"><funding-statement>This study was supported by the Ministry of Education and Science of the Russian Federation, project no. 1.2.25F</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Emerging spintronic materials and functionalities / L. Guo, S. Hu, X. Gu, R. Zhang, K. Wang, W. Yan [et al.] // Advanced Materials. 2024. Vol. 36, 22. P. 2301854. https://doi.org/10.1002/adma.202301854.</mixed-citation><mixed-citation xml:lang="en">Guo L., Hu S., Gu X., Zhang R., Wang K., Yan W., et al. Emerging spintronic materials and functionalities. Advanced Materials. 2023;36(22):2301854. https://doi.org/10.1002/adma.202301854.</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">Azovtsev A. A., Pertsev N. A. Acoustically excited magnetic dynamics and spin flow in spin-valve structures // Physical Review Applied. 2022. Vol. 17, is. 3. P. 034070. https://doi.org/10.1103/PhysRevApplied.17.034070.</mixed-citation><mixed-citation xml:lang="en">Azovtsev A.A., Pertsev N.A. Acoustically excited magnetic dynamics and spin flow in spin-valve structures. Physical Review Applied. 2022;17(3):034070. https://doi.org/10.1103/PhysRevApplied.17.034070.</mixed-citation></citation-alternatives></ref><ref id="cit3"><label>3</label><citation-alternatives><mixed-citation xml:lang="ru">Magnetic properties and I‑V characteristics of DC magnetron sputtered [Co (0.2 nm)/Ni (0.4 nm)]10 thin films /S. Sarkar, R. Hussain, D. Rajbanshi, S. K. Srivastava // MetalMat. 2024. Vol. 1, is. 2. P. e29. https://doi.org/10.1002/metm.29.</mixed-citation><mixed-citation xml:lang="en">Sarkar S., Hussain R., Rajbanshi D., Srivastava S.K. Magnetic properties and I‑V characteristics of DC magnetron sputtered [Co(0.2 nm)/Ni(0.4 nm)]10 thin films. MetalMat. 2024;1(2):e29. https://doi.org/10.1002/metm.29.</mixed-citation></citation-alternatives></ref><ref id="cit4"><label>4</label><citation-alternatives><mixed-citation xml:lang="ru">Structural and magnetic properties of micropolycrystalline Cobalt thin films fabricated by direct current magnetron sputtering / K. Song, Z. Li, M. Fang, Z. Xiao, Q. Lei // International Journal of Minerals, Metallurgy and Materials. 2024. Vol. 31. P. 384–394. https://doi.org/10.1007/s12613-023-2715-5.</mixed-citation><mixed-citation xml:lang="en">Song K., Li Z., Fang M., Xiao Z., Lei Q. Structural and magnetic properties of micropolycrystalline Cobalt thin films fabricated by direct current magnetron sputtering. International Journal of Minerals, Metallurgy and Materials. 2024;31:384-394. https://doi.org/10.1007/s12613-023-2715-5.</mixed-citation></citation-alternatives></ref><ref id="cit5"><label>5</label><citation-alternatives><mixed-citation xml:lang="ru">Abdollahi M., Shams M.H., Hosseini M.H. Enhanced magnetic properties of Ni–Zn ferrite thin films grown on Si using magnetron sputtering // Indian Journal of Physics. 2025. Vol. 100. P. 247–256. https://doi.org/10.1007/s12648-025-03774-y.</mixed-citation><mixed-citation xml:lang="en">Abdollahi M., Shams M.H., Hosseini M.H. Enhanced magnetic properties of Ni–Zn ferrite thin films grown on Si using magnetron sputtering. Indian Journal of Physics. 2025;100:247-256. https://doi.org/10.1007/s12648-025-03774-y.</mixed-citation></citation-alternatives></ref><ref id="cit6"><label>6</label><citation-alternatives><mixed-citation xml:lang="ru">Zighem F., Faurie D. A review on nanostructured thin films on flexible substrates: links between strains and magnetic properties // Journal of physics: Condensed Matter. 2021. Vol. 33, is. 23. P. 233002. https://doi.org/10.1088/1361-648X/abe96c.</mixed-citation><mixed-citation xml:lang="en">Zighem F., Faurie D.A review on nanostructured thin films on flexible substrates: links between strains and magnetic properties. Journal of physics: condensed matter. 2021;33(23):233002. https://doi.org/10.1088/1361-648X/abe96c.</mixed-citation></citation-alternatives></ref><ref id="cit7"><label>7</label><citation-alternatives><mixed-citation xml:lang="ru">Яриков С.А. Взаимодействие между магнитными слоями через полуметаллическую прослойку в системе FeNi/Bi/FeNi // Девятнадцатая Всероссийская научная конференция студентовфизиков и молодых ученых (ВНКСФ-19): материалы конференции. Архангельск: Изд-во АСТ Россия, 2013. С. 153–154.</mixed-citation><mixed-citation xml:lang="en">Yarikov S.A. Interaction between magnetic layers through a semi-metallic interlayer in the FeNi/Bi/FeNi system. In: Devyatnadtsataya Vserossiiskaya nauchnaya konferentsiya studentov-fizikov i molodykh uchenykh (VNKSF-19): materialy konferentsii = Nineteenth All-Russian scientific conference of physics students and young scientists (VNKSF-19): conference proceedings. Arkhangelsk: Izd-vo AST Russiya; 2013. P. 153-154. (In Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit8"><label>8</label><citation-alternatives><mixed-citation xml:lang="ru">Effect of substrate roughness and film thickness on the magnetic properties of CoFeB films on polymer substrate / Y. Ha, J.H. Baeg, S. Park, Y.R. Cho // Vacuum. 2021. Vol. 191. P. 110399. https://doi.org/10.1016/j.vacuum.2021.110399.</mixed-citation><mixed-citation xml:lang="en">Ha Y., Baeg J.H., Park S., Cho Y.R. Effect of substrate roughness and film thickness on the magnetic properties of CoFeB films on polymer substrate. Vacuum. 2021;191:110399. https://doi.org/10.1016/j.vacuum.2021.110399.</mixed-citation></citation-alternatives></ref><ref id="cit9"><label>9</label><citation-alternatives><mixed-citation xml:lang="ru">Химическое травление GаАs, GaSb, InАs И InSb водными растворами системы Н2О2 ‒ HBr ‒ этиленгликоль / З. Ф. Томашик, И. А. Шелюк, В. Н. Томашик, Г. М. Окрепка, П. Моравец, И. Б. Стратийчук // Неорганические материалы. 2012. Т. 48, № 9. С. 985.</mixed-citation><mixed-citation xml:lang="en">Tomashik Z.F., Shelyuk I.A., Tomashik V.N., et al. Chemical etching of GaAs, GaSb, InAs and InSb with aqueous solutions of the H2O2-HBr-ethylene glycol system. Inorganic materials. 2012;48(9):985. (In Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit10"><label>10</label><citation-alternatives><mixed-citation xml:lang="ru">Wu Y. H., Chang L. Chemical polishing method of GaAs specimens for transmission electron microscopy // Micron. 2010. Vol. 41, 1. P. 20–24. https://doi.org/10.1016/j.micron.2009.07.011.</mixed-citation><mixed-citation xml:lang="en">Wu Y.H., Chang L. Chemical polishing method of GaAs specimens for transmission electron microscopy. Micron. 2010;41(1):20-24. https://doi.org/10.1016/j.micron.2009.07.011.</mixed-citation></citation-alternatives></ref><ref id="cit11"><label>11</label><citation-alternatives><mixed-citation xml:lang="ru">Самаркин А. И., Козырев В. А. Технология электроэрозионной проволочной резки. Псков: Изд-во ППИ, 2007. 30 с.</mixed-citation><mixed-citation xml:lang="en">Samarkin A.I., Kozyrev V.A. Technology of electrical discharge wire cutting. Pskov: PPI; 2007. 30 p. (In Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit12"><label>12</label><citation-alternatives><mixed-citation xml:lang="ru">Micro/nano-particle decorated metal wire for cutting soft matter / W. Zhang, L. Feng, F. Wu, R. Zhang, C. Wu // Nanotechnology. 2016. Vol. 27. P. 355708. https://doi.org/10.1088/09574484/27/35/355708.</mixed-citation><mixed-citation xml:lang="en">Zhang W., Feng L., Wu F., Zhang R., Wu C. Micro/nano-particle decorated metal wire for cutting soft matter. Nanotechnology. 2016;27:355708. https://doi.org/10.1088/0957-4484/27/35/355708.</mixed-citation></citation-alternatives></ref><ref id="cit13"><label>13</label><citation-alternatives><mixed-citation xml:lang="ru">Процессы деградации при нагревании на воздухе в магнетронных нанопленках Ni и Cr / A. П. Кузьменко, А. Е. Кузько, Нау Динт, Мьо Мин Тан, Р. Т. Кануков // Известия Юго-Западного государственного университета. Серия: Техника и технологии. 2016. T. 19, № 2. С. 153-165.</mixed-citation><mixed-citation xml:lang="en">Kuz'menko A.P., Kuz'ko A.E., Nau Dint, M'o Min Tan, Kanukov R. T. Degradation processes during heating in air in magnetron nanofilms of Ni and Cr. Izvestiya Yugo-Zapadnogo gosudarstvennogo universiteta. Seriya: Tekhnika i tekhnologii = Proceedings of the Southwest State University. Series: Engineering and Technologies. 2016;19(2):153-165. (In Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit14"><label>14</label><citation-alternatives><mixed-citation xml:lang="ru">Alfonso J. E., Gamez-Lopez M. E., Montero O. A. A. The thermal, electrical, and magnetic characterization of Nickel thin films deposited via dc sputtering // Results in surfaces and interfaces. 2025. Vol. 21. P. 100643. https://doi.org/10.1016/j.rsurfi.2025.100643.</mixed-citation><mixed-citation xml:lang="en">Alfonso J.E., Gamez-Lopez M.E., Montero O.A.A. The thermal, electrical, and magnetic characterization of Nickel thin films deposited via dc sputtering. Results in surfaces and interfaces. 2025;2:100643. https://doi.org/10.1016/j.rsurfi.2025.100643.</mixed-citation></citation-alternatives></ref><ref id="cit15"><label>15</label><citation-alternatives><mixed-citation xml:lang="ru">The high-power impulse magnetron sputtering discharge / J. T. Gudmundsson, N. Brenning, D. Lundin, U. Helmersson // Journal of Vacuum Science &amp; Technology A. 2012. Vol. 30, is. 3. P. 030801. https://doi.org/10.1116/1.3691832.</mixed-citation><mixed-citation xml:lang="en">Gudmundsson J.T., Brenning N., Lundin D., Helmersson U. The high-power impulse magnetron sputtering discharge. Journal of Vacuum Science &amp; Technology A. 2012;30(3):030801. https://doi.org/10.1116/1.3691832.</mixed-citation></citation-alternatives></ref><ref id="cit16"><label>16</label><citation-alternatives><mixed-citation xml:lang="ru">Aich P., Meneghini C., Tortora L. Advances in structural and morphological characterization of thin magnetic films: a review // Materials. 2023. Vol. 16, 23. P. 7331. https://doi.org/10.3390/ma16237331.</mixed-citation><mixed-citation xml:lang="en">Aich P., Meneghini C., Tortora L. Advances in structural and morphological characterization of thin magnetic films: a review. Materials. 2023;16(23):7331. https://doi.org/10.3390/ma16237331.</mixed-citation></citation-alternatives></ref><ref id="cit17"><label>17</label><citation-alternatives><mixed-citation xml:lang="ru">Effect of defects, magnitocrystalline anisotropy, and shape anisotropy on magnetric structure of iron thin films by magnetic force microscopy / K. Xu, D.K. Schreiber, Y. Li, B.R. Johnson, J. McCloy // AIP Advances. 2017. Vol. 7, is. 5. P. 056806. https://doi.org/10.1063/1.4976580.</mixed-citation><mixed-citation xml:lang="en">Xu K., Schreiber D.K., Li Y., Johnson B.R., McCloy J. Effect of defects, magnitocrystalline anisotropy, and shape anisotropy on magnetric structure of iron thin films by magnetic force microscopy. AIP Advances. 2017;7(5):056806. https://doi.org/10.1063/1.4976580.</mixed-citation></citation-alternatives></ref><ref id="cit18"><label>18</label><citation-alternatives><mixed-citation xml:lang="ru">Magnetic properties affected by structural properties of sputtered Ni/Cu multilayer films with different thicknesses of Ni layers /S. Çölmekçi, A. Karpuz, H. Köçkar // Korean journal of chemical engineering. 2022. Vol. 39. P. 1946–1951. https://doi.org/10.1007/s11814-021-0998-7.</mixed-citation><mixed-citation xml:lang="en">Çölmekçi S., Karpuz A., Köçkar H. Magnetic properties affected by structural properties of sputtered Ni/Cu multilayer films with different thicknesses of Ni layers. Korean journal of chemical engineering. 2022;39:1946-1951. https://doi.org/10.1007/s11814-021-0998-7.</mixed-citation></citation-alternatives></ref><ref id="cit19"><label>19</label><citation-alternatives><mixed-citation xml:lang="ru">Структурные и морфологические особенности магнетронных пленок теллурида висмута n-типа проводимости ВЧ МР / А. П. Кузьменко, А. И. Колпаков, К. А. Матарыкин, В. В. Родионов, О. Н. Иванов, М. Н. Япрынцев // Известия Юго-Западного государственного университета. Серия: Техника и технологии. 2025. Т. 15, № 2. С. 113-131. https://doi.org/10.21869/2223-1528-2025-15-2-113-131.</mixed-citation><mixed-citation xml:lang="en">Kuzmenko A.P., Kolpakov A.I., Matarykin K.A., Rodionov V.V., Ivanov O.N., Yapryntsev M.N. Structural and morphological features of magnetron films of bismuth telluride of n-type conductivity RF MR. Izvestiya Yugo-Zapadnogo gosudarstvennogo universiteta. Seriya: Tekhnika i tekhnologii = Proceedings of the Southwest StateUniversity. Series: Engineering and Technologies. 2025;15(2):113-131. (In Russ.) https://doi.org/10.21869/2223-1528-2025-15-2-113-131.</mixed-citation></citation-alternatives></ref><ref id="cit20"><label>20</label><citation-alternatives><mixed-citation xml:lang="ru">Структурные и морфологические особенности магнетронных нанопленок TaN с разной толщиной / А. П. Кузьменко, И. С. Кашкин, А. И. Колпаков, А. И. Жакин, В. М. Емельянов // Известия Юго-Западного государственного университета. Серия: Техника и технологии. 2024. Т. 14, № 3. С. 147-164. https://doi.org/10.21869/2223-1528-2024-14-3-147-164.</mixed-citation><mixed-citation xml:lang="en">Kuzmenko A.P., Kashkin I.S., Kolpakov A.I., Zhakin A.I., Yemelyanov V.M. Structural and morphological features of magnetron nanofilms of TaN with different thicknesses. Izvestiya Yugo-Zapadnogo gosudarstvennogo universiteta. Seriya: Tekhnika i tekhnologii = Proceedings of the Southwest State University. Series: Engineering and Technologies. 2024;14(3):147-164. (In Russ.) https://doi.org/10.21869/2223-1528-2024-14-3-147-164.</mixed-citation></citation-alternatives></ref><ref id="cit21"><label>21</label><citation-alternatives><mixed-citation xml:lang="ru">Frontiers of magnetic force microscopy / O. Kazakova, R. Puttock, C. Barton, H. Corte-Leon, M. Jaafar, V. Neu [et al.] // Journal of applied physics. 2019. Vol. 125, is. 6. P. 060901. https://doi.org/10.1063/1.5050712.</mixed-citation><mixed-citation xml:lang="en">Kazakova O., Puttock R., Barton C., Corte-Leon H., Jaafar M., Neu V., et al. Frontiers of magnetic force microscopy. Journal of Applied Physics. 2019;125(6):060901. https://doi.org/10.1063/1.5050712.</mixed-citation></citation-alternatives></ref><ref id="cit22"><label>22</label><citation-alternatives><mixed-citation xml:lang="ru">Структурные и морфологические особенности магнетронных наноплёнок HfN с разной толщиной / А. П. Кузьменко, Е. О. Гусев, В. В. Родионов, А. С. Сизов, Ю. А. Миргород, Мьо Мин Тан // Известия Юго-Западного государственного университета. Серия: Техника и технологии. 2022. Т. 12, № 4. С. 110-123. https://doi.org/10.21869/2223-1528-2022-12-4-110-123.</mixed-citation><mixed-citation xml:lang="en">Kuzmenko A.P., Gusev E.O., Rodionov V.V., Sizov A.S., Mirgorod Yu.A., Than M. Structural and morphological features of HfN magnetron nanofilms with varying thickness. Izvestiya Yugo-Zapadnogo gosudarstvennogo universiteta. Seriya: Tekhnika i tekhnologii = Proceedings of the Southwest State University. Series: Engineering and Technology. 2022;12(4):110-123. (In Russ.) https://doi.org/10.21869/2223-1528-2022-12-4-110-123.</mixed-citation></citation-alternatives></ref><ref id="cit23"><label>23</label><citation-alternatives><mixed-citation xml:lang="ru">Dho J., Kim J. Magnetic domain structure of the ferromagnetic (001) NiCo2O4 film with perpendicular magnetic anisotropy // Thin solid films. 2022. Vol. 756. P. 139361. https://doi.org/10.1016/j.tsf.2022.139361.</mixed-citation><mixed-citation xml:lang="en">Dho J., Kim J. Magnetic domain structure of the ferromagnetic (001) NiCo2O4 film with perpendicular magnetic anisotropy. Thin solid films. 2022;756:139361. https://doi.org/10.1016/j.tsf.2022.139361.</mixed-citation></citation-alternatives></ref></ref-list><fn-group><fn fn-type="conflict"><p>The authors declare that there are no conflicts of interest present.</p></fn></fn-group></back></article>
